Magnescale SET-SC2020 Laserscale

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High‑Precision 2D Calibration System for Stage Accuracy Verification (10pm Resolution). The SET‑SC2020 is a high‑precision calibration system designed for evaluating and verifying the accuracy of precision stages.

Using advanced Laserscale-based measurement technology, it delivers ultra-high resolution and repeatable results, enabling engineers to assess positioning performance with confidence.

Key features

Ultra‑high resolution measurement – Achieves resolution down to 10 pm for precise motion analysis
High accuracy over 2D area – Provides ±0.5 μm cumulative accuracy across a 200 × 200 mm measurement area (after compensation)
Interferometer-level performance – Offers highly accurate measurement with minimal influence from atmospheric conditions
Optimised for precision stages – Designed specifically for evaluating XY stage accuracy and system performance
Non-contact measurement – Ensures consistent, repeatable measurement without mechanical influence

Magnescale SET-SC2020 Laserscale Configuration

How it works

The SET‑SC2020 uses a 2D Laserscale and sensor head system to measure motion across both X and Y axes.

A laser-based interferometric principle enables extremely fine position detection
Measurement data is processed through the BD700 interpolator system
Results are output via software for analysis, including CSV data and graphical evaluation

This allows engineers to: