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LinkHigh-accuracy, reflective Laserscale with signal pitch of 250nm Ideal for low-profile stages, semiconductor back-end processing equipment and precision microscopes
Key features
- Signal pitch : 250nm
- High accuracy : ±1μm/420mm
- High response speed : 700mm/s
- Minimum resolution : 0.03125nm
- Available : with/without reference point
- Completely non-contact design : Return error is theoretically eliminated.
- Scale : Soda-lime glass/Low expansion glass
- Thin head with thickness of 12mm
- Supporting various resolutions and output modes (Depending on the interpolator connected.)
- Special vacuum-compatible models available
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